JPH0230588B2 - - Google Patents
Info
- Publication number
- JPH0230588B2 JPH0230588B2 JP57070169A JP7016982A JPH0230588B2 JP H0230588 B2 JPH0230588 B2 JP H0230588B2 JP 57070169 A JP57070169 A JP 57070169A JP 7016982 A JP7016982 A JP 7016982A JP H0230588 B2 JPH0230588 B2 JP H0230588B2
- Authority
- JP
- Japan
- Prior art keywords
- transistor
- region
- conductivity type
- emitter
- epitaxial layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 39
- 239000000758 substrate Substances 0.000 claims description 17
- 230000005669 field effect Effects 0.000 claims description 7
- 230000000295 complement effect Effects 0.000 claims description 4
- 239000000463 material Substances 0.000 description 5
- 108091006146 Channels Proteins 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 230000008021 deposition Effects 0.000 description 3
- 239000012808 vapor phase Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 108010075750 P-Type Calcium Channels Proteins 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/80—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs
- H10D84/82—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components
- H10D84/83—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00, e.g. integration of IGFETs of only field-effect components of only insulated-gate FETs [IGFET]
- H10D84/85—Complementary IGFETs, e.g. CMOS
- H10D84/856—Complementary IGFETs, e.g. CMOS the complementary IGFETs having different architectures than each other, e.g. high-voltage and low-voltage CMOS
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
- H10D84/40—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers characterised by the integration of at least one component covered by groups H10D12/00 or H10D30/00 with at least one component covered by groups H10D10/00 or H10D18/00, e.g. integration of IGFETs with BJTs
- H10D84/401—Combinations of FETs or IGBTs with BJTs
- H10D84/403—Combinations of FETs or IGBTs with BJTs and with one or more of diodes, resistors or capacitors
- H10D84/406—Combinations of FETs or IGBTs with vertical BJTs and with one or more of diodes, resistors or capacitors
Landscapes
- Bipolar Transistors (AREA)
- Bipolar Integrated Circuits (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8108550A FR2505102B1 (fr) | 1981-04-29 | 1981-04-29 | Amplificateur de type darlington forme d'un transistor a effet de champ et d'un transistor bipolaire, et sa realisation en structure semi-conductrice integree |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57183067A JPS57183067A (en) | 1982-11-11 |
JPH0230588B2 true JPH0230588B2 (en]) | 1990-07-06 |
Family
ID=9257908
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57070169A Granted JPS57183067A (en) | 1981-04-29 | 1982-04-26 | Semiconductor device |
Country Status (5)
Country | Link |
---|---|
US (1) | US4547791A (en]) |
JP (1) | JPS57183067A (en]) |
DE (1) | DE3214893A1 (en]) |
FR (1) | FR2505102B1 (en]) |
GB (1) | GB2097585B (en]) |
Families Citing this family (21)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5014102A (en) * | 1982-04-01 | 1991-05-07 | General Electric Company | MOSFET-gated bipolar transistors and thyristors with both turn-on and turn-off capability having single-polarity gate input signal |
US5333282A (en) * | 1982-09-29 | 1994-07-26 | Hitachi, Ltd. | Semiconductor integrated circuit device with at least one bipolar transistor arranged to provide a direct connection between a plurality of MOSFETs |
DE3380105D1 (en) * | 1982-09-29 | 1989-07-27 | Hitachi Ltd | Semiconductor integrated circuit device |
JPS5994452A (ja) * | 1982-11-22 | 1984-05-31 | Fuji Electric Co Ltd | 複合形トランジスタ |
DE3301648A1 (de) * | 1983-01-19 | 1984-07-19 | Siemens AG, 1000 Berlin und 8000 München | Misfet mit eingangsverstaerker |
US4783694A (en) * | 1984-03-16 | 1988-11-08 | Motorola Inc. | Integrated bipolar-MOS semiconductor device with common collector and drain |
GB2164790A (en) * | 1984-09-19 | 1986-03-26 | Philips Electronic Associated | Merged bipolar and field effect transistors |
JPS6174362A (ja) * | 1984-09-19 | 1986-04-16 | Hitachi Ltd | 半導体装置 |
US4760431A (en) * | 1985-09-30 | 1988-07-26 | Kabushiki Kaisha Toshiba | Gate turn-off thyristor with independent turn-on/off controlling transistors |
JPH0654796B2 (ja) * | 1986-07-14 | 1994-07-20 | 株式会社日立製作所 | 複合半導体装置 |
US4727046A (en) * | 1986-07-16 | 1988-02-23 | Fairchild Semiconductor Corporation | Method of fabricating high performance BiCMOS structures having poly emitters and silicided bases |
FR2712428B1 (fr) * | 1993-11-10 | 1996-02-09 | Sgs Thomson Microelectronics | Commutateur bidirectionnel à commande en tension. |
JP2759624B2 (ja) * | 1995-04-19 | 1998-05-28 | エルジイ・セミコン・カンパニイ・リミテッド | 半導体素子の構造及びその製造方法 |
US5763915A (en) * | 1996-02-27 | 1998-06-09 | Magemos Corporation | DMOS transistors having trenched gate oxide |
US6242967B1 (en) | 1998-06-15 | 2001-06-05 | Fuji Electric Co., Ltd. | Low on resistance high speed off switching device having unipolar transistors |
JP2001085463A (ja) * | 1999-09-09 | 2001-03-30 | Rohm Co Ltd | 半導体チップおよびそれを用いた半導体装置 |
US6774439B2 (en) * | 2000-02-17 | 2004-08-10 | Kabushiki Kaisha Toshiba | Semiconductor device using fuse/anti-fuse system |
DE10110458A1 (de) * | 2001-03-05 | 2002-10-17 | Kord Gharachorloo Wahid | Der CMOS-Inverter im LAVE-Technologie (lateral vertikal) |
CN100422753C (zh) * | 2005-08-12 | 2008-10-01 | 上海三基电子工业有限公司 | 一种用于车载电子干扰模拟器的直流功率放大器 |
US7833282B2 (en) * | 2006-02-27 | 2010-11-16 | Mandpe Aditi H | Eustachian tube device and method |
US8742490B2 (en) * | 2011-05-02 | 2014-06-03 | Monolithic Power Systems, Inc. | Vertical power transistor die packages and associated methods of manufacturing |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR1559610A (en]) * | 1967-06-30 | 1969-03-14 | ||
JPS4836975B1 (en]) * | 1967-12-06 | 1973-11-08 | ||
US3609470A (en) * | 1968-02-19 | 1971-09-28 | Ibm | Semiconductor devices with lines and electrodes which contain 2 to 3 percent silicon with the remainder aluminum |
GB1518961A (en) * | 1975-02-24 | 1978-07-26 | Rca Corp | Amplifier circuits |
FR2311452A1 (fr) * | 1975-05-16 | 1976-12-10 | Thomson Csf | Dispositif a semi-conducteur pour commutation rapide de puissance et appareil comportant un tel dispositif |
DE2610122C3 (de) * | 1976-03-11 | 1978-11-09 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Dreipolige Halbleiteranordnung |
JPS5455178A (en) * | 1977-10-12 | 1979-05-02 | Hitachi Ltd | Protecting device |
FR2422258A1 (fr) * | 1978-01-19 | 1979-11-02 | Radiotechnique Compelec | Dispositif semiconducteur monolithique a transistors de types mos et bipolaire |
FR2449333A1 (fr) * | 1979-02-14 | 1980-09-12 | Radiotechnique Compelec | Perfectionnement aux dispositifs semi-conducteurs de type darlington |
US4329705A (en) * | 1979-05-21 | 1982-05-11 | Exxon Research & Engineering Co. | VMOS/Bipolar power switching device |
US4286175A (en) * | 1979-05-21 | 1981-08-25 | Exxon Research & Engineering Co. | VMOS/Bipolar dual-triggered switch |
US4356416A (en) * | 1980-07-17 | 1982-10-26 | General Electric Company | Voltage controlled non-saturating semiconductor switch and voltage converter circuit employing same |
-
1981
- 1981-04-29 FR FR8108550A patent/FR2505102B1/fr not_active Expired
-
1982
- 1982-03-22 US US06/360,291 patent/US4547791A/en not_active Expired - Fee Related
- 1982-04-22 DE DE19823214893 patent/DE3214893A1/de not_active Ceased
- 1982-04-26 GB GB8211994A patent/GB2097585B/en not_active Expired
- 1982-04-26 JP JP57070169A patent/JPS57183067A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
US4547791A (en) | 1985-10-15 |
FR2505102A1 (fr) | 1982-11-05 |
FR2505102B1 (fr) | 1986-01-24 |
DE3214893A1 (de) | 1982-11-18 |
GB2097585A (en) | 1982-11-03 |
GB2097585B (en) | 1985-02-13 |
JPS57183067A (en) | 1982-11-11 |
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